Dicing saw, and contact height measuring device and height measuring method thereof

• Main Authors: SUN YAHUI, ZHAO TONGYU, SHI YUNPENG, SI YAHUI, ZHENG HAIQUAN
• Format: Patent
• Language: Chinese; English
• Published: 22.11.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention relates to a dicing saw, and a contact height measuring device and height measuring method thereof. The dicing saw comprises a workbench, a workpiece bearing disc, a main shaft, the height measuring device and a control system; and the height measuring device is arranged on the workbench or the workpiece bearing disc, and comprises a height measuring body and an accelerometer, t he height measuring body includes a height measuring surface which makes contact with a scribing knife to measure the height, the accelerometer is triggered when the scribing knife is in contact with theheight measuring body, vibration can be transmitted between the accelerometer and the height measuring body, and the control system determines contact between the height measuring body and the scribing knife by detecting the vibration of the height measuring body. Compared with an existing height measuring device, the height measuring device on the dicing saw completes height measurement through detection cooperation betw