Micro-nano structure direct writing method based on spinnable material

• Main Authors: ZHANG CHENG, LIAO NINGBO, WU MINGGE
• Format: Patent
• Language: Chinese; English
• Published: 19.11.2019
• Subjects: MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention provides a micro-nano structure direct writing method based on a spinnable material. The micro-nano structure direct writing method comprises the spinnable material which is used for manufacturing micro-nano solid filaments through a spinning technology; the method comprises the following steps: 1, heating a substrate to reach or approach the melting point of micro-nano solid filaments; 2, moving the micro-nano solid filaments to the surface of the substrate under the control of a moving device, so that the tips of the micro-nano solid filaments are melted and adhered to the surface of the substrate in a heating state; 3, slightly lifting and drawing the micro-nano solid-state filament under the control of a moving device to form a micro-nano solid-state filament melt, movingthe micro-nano solid-state filament according to a direct writing path, and driving the micro-nano solid-state filament to leave the surface of the substrate by the moving device after direct writingis finished; and 4, turni