MASS FLOW SENSOR, MASS FLOW METER PROVIDED WITH MASS FLOW SENSOR, AND MASS FLOW CONTROLLER PROVIDED WITH MASS FLOW SENSOR

To provide a mass flow sensor with reduced zero-point fluctuation, a mass flow meter provided with the mass flow sensor, and a mass flow controller provided with the mass flow sensor, this mass flow sensor 20 is provided with a U-shaped flow pipe 23 within which fluid flows from one end (first end p...

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Bibliographic Details
Main Author SHIMIZU TSUNEHISA
Format Patent
LanguageChinese
English
Published 15.11.2019
Subjects
CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
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Summary:To provide a mass flow sensor with reduced zero-point fluctuation, a mass flow meter provided with the mass flow sensor, and a mass flow controller provided with the mass flow sensor, this mass flow sensor 20 is provided with a U-shaped flow pipe 23 within which fluid flows from one end (first end part 21) thereof to the other end (second end part 22) thereof and that has a bottom part and two linear parts (linear part 22B, linear part 22A) that connect the bottom part to the end parts (first end part 21, second end part 22), a first thermosensitive resistor 24 that is wrapped around one of the linear parts (linear part 22B or linear part 22A), a second thermosensitive resistor 25 that is provided so as to be removed from the first thermosensitive resistor 24 toward an end part (second endpart 22 or first end part 21) and is wrapped around the linear part (linear part 22B or linear part 22A) that the first thermosensitive resistor 24 is wrapped around, and a heat dissipation part 26 that is provided so as to
Bibliography:Application Number: CN201880022314