Methods and systems for inline parts average testing and latent reliability defect detection

• Main Authors: RATHERT ROBERT J, SHERMAN KARA L, SUTHERLAND DOUGLAS G, PRICE DAVID W, CAPPEL ROBERT
• Format: Patent
• Language: Chinese; English
• Published: 05.11.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Methods and systems for inline parts average testing and latent reliability defect recognition or detection are disclosed. An inline parts average testing method may include: performing inline inspection and metrology on a plurality of wafers at a plurality of critical steps during wafer fabrication; aggregating inspection results obtained from inline inspection and metrology utilizing one or moreprocessors to obtain a plurality of aggregated inspection results for the plurality of wafers; identifying one or more statistical outliers among the plurality of wafers at least partially based on the plurality of aggregated inspection results obtained for the plurality of wafers; and disqualifying the one or more statistical outliers from entering a supply chain for a downstream manufacturing process, or segregating the one or more statistical outliers for further evaluation, testing or repurposing. 本发明揭示用于线上部分平均测试及潜在可靠性缺陷辨识或检测的方法及系统。一种线上部分平均测试方法可包含：在晶片制作期间在多个关键步骤处对多个晶片执行线上检验及计量；利用一或多个处理器聚合从线上检验及计量获得的检验结果以针对所述多个晶片获