Anti-PID-oxidation equipment 24V outage alarm device

• Main Authors: GANG LIGANG, XIONG ZHIHONG
• Format: Patent
• Language: Chinese; English
• Published: 05.11.2019
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention discloses an anti-PID-oxidation equipment 24V outage alarm device. Anti-PID-oxidation equipment comprises a switching power supply. The switching power supply is electrically connected with a PLC and an oxygen atom generator. The PLC is connected with an equipment alarm lamp. The switching power supply is further electrically connected with the outage alarm device. The outage alarm device comprises a fixed half box and a movable half box. An electromagnet groove is formed in the side wall of the top of the fixed half box. An electromagnet is fixedly arranged in the electromagnetgroove. When the 24V power output by the switching power supply is interrupted abnormally, the outage alarm device can send out a loud sound to remind personnel to conduct treatment, and it is avoidedthat unqualified-PID silicon wafers are conveyed downwards and great cost loss and waste are caused; without using an internal storage power supply in cooperation, the maintenance cost is reduced; the movable half box cannot