Full-automatic wafer probe station and full-automatic wafer testing device

• Main Authors: JIANG YOUQING, LIU SHIWEN
• Format: Patent
• Language: Chinese; English
• Published: 05.11.2019
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention relates to a full-automatic wafer probe station for wafer testing. The full-automatic wafer probe station comprises a bearing table, a vertical moving component located below the bearingtable and a fixed base located at the bottom of the vertical moving component. The bearing table comprises a bottom plate, a plurality of base plates stacked on the upper surface of the bottom plateand a positioning part fixed to the bottom plate, and the positioning part is used for controlling the bearing table to move vertically along a fixed axis. According to the full-automatic wafer probestation for wafer testing in the invention, the motion stability and precision in the wafer testing process are ensured through a multi-reinforced stable structure. 一种用于晶圆测试的全自动晶圆探针台，包括承片台、位于所述承片台下方的竖直运动部件和位于竖直运动部件底部的固定座。所述承片台包括底板、多块堆叠于所述底板上表面的垫板和固定于底板的定位部件，所述定位部件用于控制所述承片台沿固定轴线竖直运动。本发明通过多重加固的稳定结构保证晶圆测试过程中的运动稳定性和精密度。