Scanning mirror, scanning device, and illumination device

• Main Authors: MARTE TOBIAS, BRUSTLE REINER
• Format: Patent
• Language: Chinese; English
• Published: 01.11.2019
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

The invention relates to a scanning mirror (9a) for deflecting a laser beam, comprising: a base body (12) and a mirror (15) for reflecting the laser beam. The base body (12) has a three-dimensionallystructured rear side (14) and is made of glass, in particular quartz glass, or glass ceramic, in particular microcrystalline glass. The invention also relates to a scanning device having at least onesuch scanning mirror (9a) and to an illumination device having such a scanning device. 本发明涉及一种用于使激光射束偏转的扫描镜(9a)，包括：基体(12)以及用于反射激光射束的镜面(15)。基体(12)具有三维结构化的背侧(14)并由玻璃、尤其石英玻璃或由玻璃陶瓷、尤其微晶玻璃构成。本发明也涉及一种具有至少一个这种扫描镜(9a)的扫描装置以及一种具有这种扫描装置的照射装置。