Two-dimensional auxiliary vibration imprinting device and method

• Main Authors: ZHEMING ZHANG, JINGPENG LI, GONGCHENG ZHENG, ZHEN YANG, SHITONG YANG, ZISU XU, BIN FU, HAO LU, JUNQIANG WANG, KAITUO FENG, XINYU CANG, DEEN DAI, YAMEI LIU, ZHENGFA YI, SI CHEN, QUN ZHANG, YAN GU
• Format: Patent
• Language: Chinese; English
• Published: 22.10.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention relates to a two-dimensional auxiliary vibration imprinting device and method. The device comprises a workbench, an XY axis displacement table, a Z axis displacement table, a two-dimensional micro-motion platform, an imprinting device and a heating plate. The method comprises the following steps of: placing a substrate subjected to gluing on a two-dimensional micro-motion platform, moving the two-dimensional micro-motion platform to the lower part of a template by an XY axis displacement platform, preheating photoresist by a heating plate until the photoresist does not reach a vitrification temperature, starting the two-dimensional micro-motion platform and driving the substrate to achieve two-dimensional vibration after the preheating is finished, controlling an imprinting device by a Z axis displacement platform to imprint the substrate, performing cooling and curing in air after the imprinting is finished, and finally performing vibration auxiliary demoulding. The two-dimensional micro-motion