Temperature sensor based on waveguide structure

• Main Authors: LIU LIMING, ZHANG ZHI, YI ZICHUAN, SHUI LINGLING, CHI FENG, HUI YUCHONG, WANG HONGHANG, LIU KAI
• Format: Patent
• Language: Chinese; English
• Published: 17.09.2019
• Subjects: MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

The invention relates to a temperature sensor based on a waveguide structure. The temperature sensor comprises a substrate, a waveguide consisting of noble metal-medium-noble metal, a resonant cavity, a thermal expansion part and a noble metal layer, wherein the waveguide, the resonant cavity, the thermal expansion part and the noble metal layer are positioned on the substrate; the resonant cavity is an empty cavity; the outer side of the resonant cavity is made of noble metal materials; the resonant cavity is positioned on one side of the waveguide and is separated from the waveguide; the thermal expansion part is positioned in the resonant cavity; the noble metal layer coats the outer side of the thermal expansion part to form the annular resonant cavity; and two sides of the annular resonant cavity are made of noble metal materials. When a temperature changes, the effective refractive index of the resonant cavity changes, and the resonance wavelength of the resonant cavity changes. The change of the resona