Method of operating process control system and process control system

The present invention provides a method of operating a process control system and a process control system. In one embodiment, the process control system includes: (1) an optical sensor configured tomonitor a production process within a process chamber and generate optical data therefrom, (2) an ope...

Full description

Saved in:
Bibliographic Details
Main Authors SEAN LYNES, RICHARD J. DAIGNAULT JR, ZHIYONG GU, HONG CHEN
Format Patent
LanguageChinese
English
Published 10.09.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

Be the first to leave a comment!
You must be logged in first