Method of operating process control system and process control system

• Main Authors: SEAN LYNES, RICHARD J. DAIGNAULT JR, ZHIYONG GU, HONG CHEN
• Format: Patent
• Language: Chinese; English
• Published: 10.09.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention provides a method of operating a process control system and a process control system. In one embodiment, the process control system includes: (1) an optical sensor configured tomonitor a production process within a process chamber and generate optical data therefrom, (2) an operational controller configured to perform critical functions to determine processing conditions ofthe production process from the optical data, wherein the critical functions are directed by critical function controls, and (3) an adaptable management controller configured to provide the critical function controls to the operational controller, wherein the adaptable management controller is hierarchically isolated from the operational controller during the critical functions. 本发明提供一种操作工艺控制系统的方法及一种工艺控制系统。在一个实施例中，所述工艺控制系统包含：(1)光学传感器，其经配置以监测工艺室内的生产工艺且依据所述生产工艺而产生光学数据；(2)操作控制器，其经配置以执行关键功能以依据所述光学数据确定所述生产工艺的处理状况，其中所述关键功能是由关键功能控件引导；(3)可适应性管理控制器，其经配置以将所述关键功能控件提供到所述操作控制器，其中在所述关键功能期间，所述可适应性管理控制器与所述操作控制器被分级隔离。