Large-area atomic-level precision laser molecular beam epitaxial film preparation system and method

• Main Authors: GAO CHUNLEI, YE BIYING, HUANG HAIMING, WU SHIWEI, WANG WENBIN, YIN LIFENG, ZHU YINYAN, YU YANG, SHEN JIAN
• Format: Patent
• Language: Chinese; English
• Published: 20.08.2019
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The invention discloses a large-area atomic-level precision laser molecular beam epitaxial film preparation system and method. The system comprises a rapid sample feeding chamber, a main chamber and accessories thereof, an excimer laser, a gas transmission assembly, a mechanical pump and a plurality of molecular pumps. According to the preparation system and method, the full-reflecting mirror inthe laser light path is controlled through a two-axis stepping motor, an oxygen tube, a high-energy electron diffraction and a sample heating assembly in the system are modified, the sample frame andthe sample holder are redesigned, and uniform growth of a large sample is realized; the system and method has the advantages of being large in growth area, flat in surface, free of particulate mattersand consistent in physical properties of all regions; the automatic and manual growth of the sample can be realized by controlling equipment such as a laser light path and a target table. 本发明公开了一种大面积原子级精度激光分子束外延薄膜制备系统及方法。本发明系统包