PANEL FOR FLEXIBLE DIGITAL X-RAY DETECTOR AND MANUFACTURING METHOD THEREOF

• Main Authors: KIM JINPIL, YUN MINSEOK
• Format: Patent
• Language: Chinese; English
• Published: 19.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

A panel for a flexible digital X-ray detector and a method for manufacturing the same are disclosed. The flexible digital X-ray detector reduce device characteristic deterioration caused by X-ray exposure, increase flexibility to the panel by reducing a thickness of the panel yet provide rigidity to maintain the shape of the panel, and reduce residual impurities during a Laser Lift Off (LLO) process. The panel can include a multi-buffer layer in which a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer are alternately stacked, and a device array layer and a scintillator layer thatare disposed over the multi-buffer layer. During the LLO process, the method for manufacturing the panel includes increasing the hydrogen content using a sacrificial layer including an amorphous silicon (a-Si) layer and a silicon nitride (SiNx) layer disposed at both surfaces of the a-Si layer, such that the amount of residual impurities in the sacrificial layer can be reduced. 公开了一种用于柔性数字X射线探测器的面板及其制造方法。柔性数字X射线探测器使由X射线暴露