Silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment
The invention discloses a silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment. The capacitance voltage gain coefficient of a silicon micro-resonant accelerometer interface circuit is derived by a formula and is converted to a c...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.07.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment. The capacitance voltage gain coefficient of a silicon micro-resonant accelerometer interface circuit is derived by a formula and is converted to a conversion coefficient of amplitude to output voltage of the silicon micro-resonant accelerometer, and the sensitivity of the capacitance voltage gain coefficient to temperature is given; an automatic gain control circuit stabilizes the amplitude of a resonant beam of the silicon micro-resonant accelerometer to the amplitude driven under given reference voltage, and when the capacitance voltage gain coefficient of the silicon micro-resonant accelerometer interface circuit changes along with the temperature and the temperature changes, a peripheral control circuit executes influences on the resonant frequency, and the sensitivity of the resonant frequency and the temperature is obtained; and through proper setting of |
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Bibliography: | Application Number: CN201910011712 |