Silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment

• Main Authors: HUANG LIBIN, FAN SHUCONG, LI WENXIANG, ZHAO LIYE, LI HONGSHENG
• Format: Patent
• Language: Chinese; English
• Published: 16.07.2019
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

The invention discloses a silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment. The capacitance voltage gain coefficient of a silicon micro-resonant accelerometer interface circuit is derived by a formula and is converted to a conversion coefficient of amplitude to output voltage of the silicon micro-resonant accelerometer, and the sensitivity of the capacitance voltage gain coefficient to temperature is given; an automatic gain control circuit stabilizes the amplitude of a resonant beam of the silicon micro-resonant accelerometer to the amplitude driven under given reference voltage, and when the capacitance voltage gain coefficient of the silicon micro-resonant accelerometer interface circuit changes along with the temperature and the temperature changes, a peripheral control circuit executes influences on the resonant frequency, and the sensitivity of the resonant frequency and the temperature is obtained; and through proper setting of