THERMAL CONDUCTIVITY MEASUREMENT DEVICE, THERMAL CONDUCTIVITY MEASUREMENT METHOD, AND VACUUM EVALUATION DEVICE

• Main Authors: GOTO YUKIHIRO, CHIBA ISAMU, HASEGAWA TOSHIKAZU
• Format: Patent
• Language: Chinese; English
• Published: 09.07.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present invention is provided with: a heat generation source disposed so as to be in contact with an object subject to thermal conductivity measurement; a thermal resistance material disposed so as to be in contact with the heat generation source; at least a pair of differential thermocouples for measuring the voltage value arising from the difference in temperature between two points on the thermal resistance material, the difference being generated by the flow of heat from the heat generation source; and a calculation device for computing the rate at which the voltage output from the differential thermocouples changes over time, and for computing, on the basis of the computed rate of change over time, thermal conductivity of the object subject to thermal conductivity measurement. 具有：热产生源，配置为与热传导率的测定对象物接触；热阻材料，配置为与热产生源接触；至少1对示差热电偶，测定通过从热产生源流出热而产生的热阻材料的两点间的温度差所引起的电压值；以及计算装置，计算示差热电偶的输出电压的时间变化率，基于所计算出的时间变化率来计算测定对象物的热传导率。