INTEGRATED SPECTRAL UNIT

Aspects of the disclosure relate to an Integrated spectral unit including a micro- electro-mechanical systems (MEMS) interferometer fabricated within a first substrate arid a light redirecting structure- integrated on a second substrate, where the second substrate is coupled to the first substrate....

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Bibliographic Details
Main Authors HASSAN KHALED, MEDHAT MOSTAFA, SABRY YASSER M, HADDARA HISHAM, KHALIL DIAA ABDEL MAGED, SAADANY BASSAM
Format Patent
LanguageChinese
English
Published 05.07.2019
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:Aspects of the disclosure relate to an Integrated spectral unit including a micro- electro-mechanical systems (MEMS) interferometer fabricated within a first substrate arid a light redirecting structure- integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with, respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer. 本公开的方面涉及集成光谱单元，其包括在第一基板内制造的微机电系统(MEMS)干涉仪以及在第二基板上集成的光重定向结构，其中第二基板被耦合到第一基板。光重定向结构包括至少一个镜，该至少一个镜用于接收在相对于第一基板的面外方向上传播的输入光束以及将输入光束重定向到朝向MEMS干涉仪的相对于第一基板的面内方向。
Bibliography:Application Number: CN201780037361