GASSES FOR INCREASING YIELD AND RELIABILITY OF MEMS DEVICES

In described examples, a MEMS device (206) is enclosed within a sealed package (200) including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the MEMS device (206)is protected against premature failure from various causes, including charging, particle growth and...

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Bibliographic Details
Main Authors SING MOLLY NELIS, JACOBS SIMON JOSHUA
Format Patent
LanguageChinese
English
Published 05.07.2019
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Summary:In described examples, a MEMS device (206) is enclosed within a sealed package (200) including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the MEMS device (206)is protected against premature failure from various causes, including charging, particle growth and stiction by moieties of the nonmetal oxide gasses reacting with various exposed surfaces within thepackage (200) of the MEMS device (206) and/or the adsorbed water layers on said surfaces. 在所描述的实例中，MEMS装置(206)包封在包含在按体积计大于1％的水平的非金属氧化物气体的密封封装(200)内。在至少一个实例中，所述MEMS装置(206)针对来自各种起因的早期故障受到保护，所述起因包含通过所述非金属氧化物气体的部分与在所述MEMS装置(206)的所述封装(200)内的各种暴露的表面和/或所述表面上的吸附的水层反应的充电、粒子生长和静摩擦。
Bibliography:Application Number: CN201780068930