Two-dimensional plane holographic grating exposure device

• Main Authors: JIANG SHAN, WANG WEI, BAYINHEXIGE, LI WENHAO, SONG YING
• Format: Patent
• Language: Chinese; English
• Published: 11.06.2019
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The application relates to the technical field of the holographic grating manufacturing, and specifically discloses a two-dimensional plane holographic grating exposure device. The exposure device comprises a laser for emitting light source laser, a half wave plate, a first fixed frequency acoustic-optical modulator, a polarization beam splitter prism, a first beam splitter prism, a first shift frequency acoustic-optical modulator, a first plane reflector, a first filter collimation system, a first light splitter, a second beam splitter prism, a third shift frequency acoustic-optical modulator, a third plane reflector, a third filter collimation system, a third light splitter, a third fixed frequency acoustic-optical modulator, a fourth plane reflector, a fourth filtering collimation system, a fourth light splitter, an outer difference phase measurement module, a two-dimensional movement worktable and a control system. The device performs the scanning exposure on the grating base by adopting a small-sized two