Semiconductor device having contact plugs

• Main Authors: CHO CHI-WON, KIM SUNG-MIN, YOON CHANG-SEOP
• Format: Patent
• Language: Chinese; English
• Published: 04.06.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device having a contact plug is provided. The semiconductor device includes: a first fin; a second fin proximate the first fin and substantially parallel to the first fin, the first fin and the second fin forming a multi-fin active region; a first source/drain on the first fin; a second source/drain on the second fin; and a first contact plug on the first source/drain and on the second source/drain, where a center of the first contact plug is offset from a center of the multi-fin active region. 提供了一种具有接触塞的半导体装置。该半导体装置包括：第一鳍；第二鳍，紧邻第一鳍并且基本平行于第一鳍，第一鳍和第二鳍形成多鳍有源区；第一源/漏，位于第一鳍上；第二源/漏，位于第二鳍上；以及第一接触塞，位于第一源/漏上并且位于第二源/漏上，其中，第一接触塞的中心从多鳍有源区的中心偏移。