Reticle, reticle container and method for discharging static charges accumulated on reticle

• Main Authors: CHANG HSIAO-LUN, CHEN LI-JUI, CHENG POUNG, HSU CHEANG, LEE TSUNG-YEN, FU TZUNGI, KUO CHUEHI
• Format: Patent
• Language: Chinese; English
• Published: 28.05.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The disclosure provides a reticle, a reticle container and a method for discharging static charges accumulated on a reticle. The reticle includes a mask substrate, a reflective multilayer (ML) structure, a capping layer, an absorption structure and a conductive material structure. The mask substrate has a front-side surface and a back-side surface. The reflective ML structure is positioned over the front-side surface of mask substrate. The capping layer is positioned over the reflective ML structure. The absorption structure is positioned over the capping layer. The conductive material structure is positioned over a sidewall surface of the mask substrate and a sidewall surface of the absorption structure. 本公开提供一种提供了掩模、掩模容器和掩模上累积的静电荷的放电方法。掩模包括遮罩基板、反射多层结构、覆盖层、吸收结构和导电材料结构。遮罩基板具有前侧表面和后侧表面。反射多层结构位于遮罩基板的前侧表面上方。覆盖层位于反射多层结构上方。吸收结构位于覆盖层上方。导电材料结构位于遮罩基板的侧壁表面和吸收结构的侧壁表面上方。