Furnace body exhaust system, cleaning method and crystal pulling furnace system with furnace body exhaust system

• Main Authors: QUAN HONGYONG, QUAN XUANGUO, PAN HAO, ZHANG PENGJU, LAN XUN, TONG JIAXI
• Format: Patent
• Language: Chinese; English
• Published: 09.04.2019
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The invention provides a furnace body exhaust system, a cleaning method and a crystal pulling furnace system with the furnace body exhaust system. The furnace body exhaust system comprises an exhaustpipeline, an opening/closing plate and a control part; the exhaust pipeline comprises an exhaust pipeline inlet and an exhaust pipeline outlet which are arranged at two ends of the exhaust pipeline, the inlet is used for being connected with an air outlet of a furnace body, a window is formed in the exhaust pipeline near the outlet, and the size of the window is larger than that of a rolling member for cleaning the exhaust pipeline; the opening/closing plate is arranged on the window and has a closed state and an open state, the window is closed when the opening/closing plate is in the closedstate, and the window is opened when the opening/closing plate is in the open state; and the control part is connected with the opening/closing plate and is used for controlling the opening/closing plate to be in the closed st