Optical element temperature control method and optical system
The invention relates to an optical element temperature control method and an optical system. The method comprises the following steps of when temperature control is performed on a controlled opticalelement, detecting the temperature of a current peripheral mechanical piece used for mounting the con...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
05.04.2019
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Subjects | |
Online Access | Get full text |
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