Optical element temperature control method and optical system

• Main Authors: CHEN SHUIZHONG, ZHU HAIBO, QIAO ZHANDUO
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2019
• Subjects: CONTROLLING; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

The invention relates to an optical element temperature control method and an optical system. The method comprises the following steps of when temperature control is performed on a controlled opticalelement, detecting the temperature of a current peripheral mechanical piece used for mounting the controlled optical element and a current environment temperature; acquiring the temperature of the controlled optical element corresponding to a current target temperature, a current peripheral mechanical piece temperature and the current environment temperature according to corresponding relations among the temperature of the peripheral mechanical piece, the corresponding environment temperature, the corresponding target temperature and the temperature of the controlled optical element and the current target temperature; using the acquired temperature of the controlled optical element as a feedback value of the current actual temperature of the controlled optical element; and performing temperature control on the con