Radiation damage reliability evaluation method and device for semiconductor device
The embodiment of the invention provides a radiation damage reliability evaluation method and device for semiconductor device. The method comprises the following steps: obtaining a survival probability value of a sample obtained by testing under the condition of preset test stress level value; input...
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| Format | Patent |
| Language | Chinese English |
| Published |
19.03.2019
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| Subjects | |
| Online Access | Get full text |
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| Summary: | The embodiment of the invention provides a radiation damage reliability evaluation method and device for semiconductor device. The method comprises the following steps: obtaining a survival probability value of a sample obtained by testing under the condition of preset test stress level value; inputting the preset test stress level value, the sample survival probability value, and the estimated cumulative radiation dose of the semiconductor device to a preset calculation model, and outputting the survival probability value of the semiconductor device; evaluating reliability of the semiconductor device according to a survival probability value of the semiconductor device. The radiation damage reliability evaluation method and device of the semiconductor device provided by the embodiment ofthe invention utilize the incomplete test data under the condition of preset test stress level value to obtain the survival probability value of the semiconductor device, and evaluate the reliabilityof the semiconductor devic |
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| Bibliography: | Application Number: CN201811174784 |