APPARATUS, METHOD AND SYSTEM FOR INSPECTING WAFER CARRIERS

• Main Authors: PAI JIUN-RONG, CHUANG SHENG-HSIANG, KUO SHAU-WEN, LIU HSU-SHUI, HU CHENG-KANG
• Format: Patent
• Language: Chinese; English
• Published: 05.03.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing having an opening on a wall of the housing; a load port outside the housing; a robot arm inside the housing; and a processor. The load port is coupled to the wall and configured to load a wafer carrier for inspection. The robot arm is configured to move a first camera connected to the robot arm. The first camera is configured to capture a plurality of images of the wafer carrier. The processor is configured to process the plurality of images to inspect the wafer carrier. 本揭露公开了种芯片载具检测设备。在实例中，设备包括：在外壁上具有开口的壳体；在壳体外的加载埠；在壳体内的机械手臂；以及处理器。加载端口耦接于外壁，且配置以加载芯片载具从而进行检测。机械手臂配置以移动连接到机械手臂的第相机。第相机配置以拍摄芯片载具的多个影像。处理器配置以处理所述多个影像，以检测芯片载具。