APPARATUS, METHOD AND SYSTEM FOR INSPECTING WAFER CARRIERS
An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing having an opening on a wall of the housing; a load port outside the housing; a robot arm inside the housing; and a processor. The load port is coupled to the wall and configured to load a wafer...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
05.03.2019
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing having an opening on a wall of the housing; a load port outside the housing; a robot arm inside the housing; and a processor. The load port is coupled to the wall and configured to load a wafer carrier for inspection. The robot arm is configured to move a first camera connected to the robot arm. The first camera is configured to capture a plurality of images of the wafer carrier. The processor is configured to process the plurality of images to inspect the wafer carrier.
本揭露公开了种芯片载具检测设备。在实例中,设备包括:在外壁上具有开口的壳体;在壳体外的加载埠;在壳体内的机械手臂;以及处理器。加载端口耦接于外壁,且配置以加载芯片载具从而进行检测。机械手臂配置以移动连接到机械手臂的第相机。第相机配置以拍摄芯片载具的多个影像。处理器配置以处理所述多个影像,以检测芯片载具。 |
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Bibliography: | Application Number: CN201811010338 |