Method for coupling silicon-based optoelectronic chip and single-mode optical fiber

• Main Authors: WANG ZONGWANG, XIA XIAOLIANG
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2019
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention relates to the technical field of optical communication devices, and specifically relates to a method for coupling a silicon-based optoelectronic chip and a single-mode optical fiber. Asilicon dioxide layer is deposited and grown on a silicon substrate, and silicon waveguide is disposed in the silicon dioxide layer. An end face of the single-mode optical fiber is arranged in a convex curved shape. A gap is between the single-mode optical fiber and the silicon dioxide layer. At least one section of low refractive index waveguide is disposed between the single-mode optical fiber and the silicon waveguide. The low refractive index waveguide has a sheet-shaped rectangular parallelepiped shape and both ends have sharp corners. An incident end of the silicon waveguide is a sharp corner. A fiber core outgoing end of the single-mode optical fiber is aligned with the incident end of the low refractive index waveguide. The low refractive index waveguide partially overlaps the silicon waveguide in a horizo