High-hardness material of high-entropy alloy nitride coating and preparation method of the high-hard material

• Main Authors: LIU XIAOPENG, YAO XIAOFEI, SU LINSHEN, XU DAPENG, CHEN JIAN, YANG WEI, LYU YUKUN
• Format: Patent
• Language: Chinese; English
• Published: 15.02.2019
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a high-hardness material of a high-entropy alloy nitride coating and a preparation method of the high-hardness material. The high-hardness material is composed of a Cr transition layer located on the surface of a substrate, a CrN transition layer located on the surface of the Cr transition layer and a nitride coating located on the surface of the CrN transition layer; the nitride coating is obtained by using a radio frequency sputtering method through deposition of nitrogen and a high-entropy alloy, and the thickness of the Cr transition layer is 80-150 nm, the thickness of the CrN transition layer is 50-100 nm, and the thickness of the nitride coating is 1.5-2.5 [mu]m. The obtained high-hardness material of the high-entropy alloy nitride coating not only has a highhardness of more than 50 GPa, but also has good abrasion performance; and the coating has the characteristics of simple production technology, high deposition speed, low costs and the like, has the advantages of high efficie