SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

• Main Authors: CHO JAEYONG, SU ZONGHUI, ROCHA-ALVAREZ JUAN CARLOS, LIN XING, HAMMOND EDWARD P IV, ZHOU JIANHUA, YE ZHENG JOHN
• Format: Patent
• Language: Chinese; English
• Published: 05.02.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES

A method and apparatus for a heated substrate support pedestal is provided. In one embodiment, the heated substrate support pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body A stem is coupled to a bottom surface of the body. A plurality of heater elements, a top electrode and a shield electrode are disposed within the body. The topelectrode is disposed adjacent a top surface of the body, while the shield electrode is disposed adjacent the bottom surface of the body. A conductive rod is disposed through the stem and is coupledto the top electrode. 提供了种用于加热的基板支撑基座的方法及装置。在个实施例中，该加热的基板支撑基座包括：主体，包括陶瓷材料；多个加热元件，封装在该主体内。柱耦合至该主体的底面。多个加热器元件、顶电极及屏蔽电极安置在该主体内。该顶电极安置在该主体的顶面附近，而该屏蔽电极安置在该主体的该底面附近。导电杆被安置成穿过该柱且耦合至该顶电极。