Cooling device for ion source beam
The invention provides a cooling device for an ion source beam. In the device, a discharge chamber outer cover, a discharge chamber, a discharge chamber flange and a discharge chamber end baffle are assembled through tolerance fit and then welded into an integral whole, a cooling water inlet and out...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
29.01.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a cooling device for an ion source beam. In the device, a discharge chamber outer cover, a discharge chamber, a discharge chamber flange and a discharge chamber end baffle are assembled through tolerance fit and then welded into an integral whole, a cooling water inlet and outlet pipe is welded with the discharge chamber flange into an integral whole and is connected with anexternal water source through connecting a threaded quick-release connector and a hose so as to form a cooling water circulation loop together, thereby achieving a purpose of cooling the heat of theion source beam. The cooling device has the advantages of compact and simple structure, efficient cooling, safety, reliability and long service life.
本发明提供了种用于离子源束流的冷却装置,所述装置中的放电室外罩、放电室、放电室法兰与放电室端挡板通过公差配合装配后焊接为体,冷却水进出管与放电室法兰焊接为体,与外部水源通过带螺纹快卸接头连接软管接通,共同形成冷却水循环回路,达到对离子束流热量冷却的目的。本发明结构紧凑、简单,冷却高效、安全可靠,使用寿命长。 |
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Bibliography: | Application Number: CN201811199797 |