Cooling device for ion source beam

• Main Authors: LIU BIN, CUI YUANPING, LUO ZHENGHUA, KE JIANLIN, HU YONGHONG, XU SHAOMEI, DU WEIXING, XIA XIUQING, ZHANG QINLONG, TIAN HUA
• Format: Patent
• Language: Chinese; English
• Published: 29.01.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention provides a cooling device for an ion source beam. In the device, a discharge chamber outer cover, a discharge chamber, a discharge chamber flange and a discharge chamber end baffle are assembled through tolerance fit and then welded into an integral whole, a cooling water inlet and outlet pipe is welded with the discharge chamber flange into an integral whole and is connected with anexternal water source through connecting a threaded quick-release connector and a hose so as to form a cooling water circulation loop together, thereby achieving a purpose of cooling the heat of theion source beam. The cooling device has the advantages of compact and simple structure, efficient cooling, safety, reliability and long service life. 本发明提供了种用于离子源束流的冷却装置，所述装置中的放电室外罩、放电室、放电室法兰与放电室端挡板通过公差配合装配后焊接为体，冷却水进出管与放电室法兰焊接为体，与外部水源通过带螺纹快卸接头连接软管接通，共同形成冷却水循环回路，达到对离子束流热量冷却的目的。本发明结构紧凑、简单，冷却高效、安全可靠,使用寿命长。