SYSTEM AND METHOD FOR COMPENSATION OF ILLUMINATION BEAM MISALIGNMENT

• Main Authors: XU ZHIWEI STEVE, AUYEUNG KWAN, YUDITSKY YURY, LI FRANK, SWISHER TIMOTHY
• Format: Patent
• Language: Chinese; English
• Published: 21.12.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A system includes a beam steering assembly configured to adjust an incident beam to form a corrected beam; a beam monitoring assembly configured to generate monitoring data for the corrected beam including one or more offset parameters of the corrected beam; and a controller configured to store one or more zero parameters of the corrected beam, calculate at least one difference between the one ormore zero parameters and the one or more offset parameters of the corrected beam, determine one or more beam position adjustments of the incident beam based on the at least one difference between theone or more zero parameters and the one or more offset parameters of the corrected beam, and direct the beam steering assembly via one or more motor drivers to actuate one or more motors to adjust theincident beam to form the corrected beam. 本发明涉及种系统，其包含：光束操纵组合件，其经配置以调整入射光束以形成校正光束；光束监测组合件，其经配置以产生用于所述校正光束的监测数据，所述监测数据包含所述校正光束的或多个偏移参数；及控制器，其经配置以：存储所述校正光束的或多个零参数；计算所述校正光束的所述或多个零参数与所述或多个偏移参数之间的至少个差异；基于所述校正光束的所述或多个零参数与所述或多个偏移参数之间