Focusing compensation method and device

• Main Author: GUI YUCHANG
• Format: Patent
• Language: Chinese; English
• Published: 07.12.2018
• Subjects: ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION

The invention discloses a focusing compensation method and device. The method comprises the following steps: (S11) providing an exposure machine lens group, which has a focal point; (S12) providing anobject to be tested, measuring a plurality of line widths of the object to be tested at a plurality of points on an axial direction of a plurality of line segments under a plurality of different focusing conditions to obtain a plurality of measured values, and forming at least one line width curve via the plurality of measured values; and (S13) correcting a focusing operation of the exposure machine lens group according to the at least one line width curve. According to the focusing compensation method and device disclosed by the invention, the line width of the product is measured, the focusing condition of the exposure machine is fed back, and the focusing of the exposure machine is corrected to improve the focusing precision of the exposure machine. 本发明公开种对焦补偿的方法及其设备，包含以下步骤：(S11)提供曝光机镜组，具有焦点；(S12)提供待测物，对所述待测物以