Method for recovering wave surface with high precision based on single width interference fringe

• Main Authors: MA WENCHAO, HU LIFA, SHEN WEN, LIU XINYU, HU DONGTING
• Format: Patent
• Language: Chinese; English
• Published: 07.12.2018
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a method for recovering a wave surface with high precision based on a single width interference fringe and belongs to the field of surface shape measurement of optical components. The method includes the following steps: peak values and valley values are assigned in an interference region so as to convert the same into phases, the interference fringe is divided into regions, pixels of interferometer cameras in the same region are enabled to be the same in parity, and accurate phase extraction is performed to achieve high-precision wave surface recovery. According to themethod disclosed in the invention, the peak values and the valley values are assigned in the interference region so as to convert the same into phases, the interference fringe is divided into the regions, the pixels of the interferometer cameras in the same region are enabled to be the same in parity, and accurate phase extraction is performed to achieve high-precision wave surface recovery. Themethod is simple and effic