X-ray broadband energy selection device and method for manufacturing same

• Main Authors: CAO ZHURONG, LI YUKUN, CHEN TAO, DENG BO, YUAN ZHENG, WANG QIANGQIANG, DENG KELI, NIU GAO
• Format: Patent
• Language: Chinese; English
• Published: 23.11.2018
• Subjects: FUSION REACTORS; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

The invention provides an X-ray broadband energy selection device. The X-ray broadband energy selection device comprises a nano-rod array, a thin metal layer and a supporting film, wherein the nano-rod array is manufactured on the upper surface of the thin metal layer and the supporting film is pasted to the lower surface of the thin metal layer. The energy selection device has the advantages of small infinitesimal element size and high energy selection precision and can be applied to imaging diagnosis apparatuses with a space resolution of a few microns to realize band spectrum imaging diagnosis. The invention also provides a method for manufacturing the X-ray broadband energy selection device. The method comprises the steps of punching a polycarbonate material by using the X-ray lithography technology, and growing nano-rods in the holes by using the electrochemical deposition method to form nano-rods with great rod body perpendicularity and side wall roughness. Square nano-rod arrayswith any high aspect rat