X-ray coherent measuring device and measuring method

The invention provides an X-ray coherent measuring device which comprises an x-ray beam splitting unit; an x-ray beam combining unit and an x-ray time-delay scanning unit which is arranged between thex-ray beam splitting unit and the x-ray beam combining unit and comprises a first pair of transmissi...

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Main Authors JIANG ZHIQIANG, CHEN JIAHUA, ZHANG WENYAN, WANG YUE, LI BIN, LI QINMING, LAN TAIHE, LI ZHUO, LIU BO, WANG DONG, ZHANG WEIQING, WANG XINGTAO, FENG LIE
Format Patent
LanguageChinese
English
Published 16.10.2018
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Summary:The invention provides an X-ray coherent measuring device which comprises an x-ray beam splitting unit; an x-ray beam combining unit and an x-ray time-delay scanning unit which is arranged between thex-ray beam splitting unit and the x-ray beam combining unit and comprises a first pair of transmission reflecting mirrors and a second pair of transmission reflecting mirrors, wherein the first pairof transmission reflecting mirrors are symmetrically arranged relative to the central axis, the second pair of transmission reflecting mirrors are symmetrically arranged relative to the central axis;and the first pair of transmission reflecting mirrors are respectively fixed on the two sliding rails. The sliding rail directions of the two sliding rails are approximately perpendicular to the central axis. The second pair of transmission reflecting reflectors are fixed on a one-dimensional translation table together; and the translation direction of the one-dimensional translation table is parallel to the central axis. T
Bibliography:Application Number: CN201810172034