MULTIPHASE LINEAR MOTOR, MULTIPHASE PLANAR MOTOR, STAGE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

• Main Authors: HOOGENDAM CHRISTIAAN ALEXANDER, BRAAKSMA DAVE, HEIJMANS PETER MICHEL SILVESTER MARIA, KIMMAN MAARTEN HARTGER
• Format: Patent
• Language: Chinese; English
• Published: 28.09.2018
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRICITY; GENERATION

An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction,wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2. 描述种电磁电动机，该电磁电动机包括：磁体组件，被配置为生成在第方向上具有节距Pm1并且在第二方向上具有节距Pm2的二维交变磁场；线圈组件，被配置为与磁体组件协作以在第方向上生成第力并且在第二方向上生成第二力，其中线圈组件包括第线圈组和第二线圈组，第线圈组包括用于生成第力的多个第线圈，第二线圈组包括用于生成第二力的多个第二线圈，其中第线圈组中在第方向上的线圈节距Pc1与Pm1的比率R1不同于第二线圈组中在第二方向上的