Semiconductor product test mechanism utilizing electrostatic carrier

• Main Author: YE XIUHUI
• Format: Patent
• Language: Chinese; English
• Published: 14.09.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

The invention relates to a semiconductor product test mechanism utilizing an electrostatic carrier and is a mechanism utilizing the electrostatic carrier bearing a semiconductor product to carry out direct test. The mechanism comprises a mobile carrier board configured with at least one electrostatic circuit to apply static electricity to make the mobile carrier board absorb the carried semiconductor product, a mobile test probe set comprising a probe mechanism comprising a probe or multiple probes, a robot arm used for driving the probe mechanism to a desired test point, a control mechanism which is connected with the robot arm, comprises a control circuit and is used for controlling movement of the robot arm, a test circuit used for capturing required data through the probe, and a computer which is connected with the control mechanism and is used for capturing the test data of the test circuit, wherein the computer can receive input of a user to determine test items and a test mannerof the test circuit and