Method for manufacturing multilayer perforated plate multi-channel throttling assembly of micro flow control device

• Main Authors: WEI YANMING, ZHANG BING, HUI HUANHUAN, LIU HUI, GOU HAOLIANG, ZENG ZHAOQI
• Format: Patent
• Language: Chinese; English
• Published: 14.09.2018
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

The invention discloses a method for manufacturing a multilayer perforated plate multi-channel throttling assembly of a micro flow control device. The method comprises the following steps: etching perforated plates by adopting a lithography method; performing micro-porous laser processing on the perforated plates; performing diffusion welding on the perforated plates subjected to laser processingand a cover plate so as to form the multilayer perforated plate multi-channel throttling assembly. By virtue of etching of the perforated plates, laser processing and diffusion welding, the advantagesof multiple special processing technologies are achieved, the problem that the traditional gas micro flow control assembly is easy to block is solved, the precision of the gas micro flow control assembly is improved, and the defect that the traditional gas micro flow control assembly is low in precision is overcome; by pressurizing the diffusion welded perforated plates and cover plate, reliableconnection and seal of the