ORGANIC FILM COMPOSITION AND PATTERN FORMING METHOD

• Main Authors: LIM JAEBUM, HEO YUMI, CHOI YOOJEONG, MUN SOOHYOUN, KANG SUNHAE
• Format: Patent
• Language: Chinese; English
• Published: 21.08.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP; USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS

The present invention discloses: an organic film composition containing a polymer, which comprises a structural unit represented by chemical formula 1, an additive represented by chemical formula 2, and a solvent; and a pattern forming method using the organic film composition. Chemical formulas 1 and 2 are the same as those defined in the description. 本发明揭示种有机膜组合物及使用所述有机膜组合物形成图案的方法，有机膜组合物包含有包含由化学式1表示的结构单元的聚合物、由化学式2表示的添加剂以及溶剂。化学式1及化学式2与实施方式中所定义相同。