Lithographic apparatus having an active base frame support
A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged between the base frame and a ground floor. The active base frame support is configured to support the base frame on the ground floor. The ac...
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Format | Patent |
Language | Chinese English |
Published |
03.08.2018
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Abstract | A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged between the base frame and a ground floor. The active base frame support is configured to support the base frame on the ground floor. The active base frame support comprises an actuator configured to exert a force in a horizontal directionbetween the base frame and the ground plane. The lithographic apparatus further comprises a control device configured to drive the actuator, a signal representative of a disturbance force on the baseframe being provided to the control device, the control device being configured to drive the actuator using the force sensor signal.
种光刻设备包括:构造成形成光刻设备的支撑结构的底架、布置在底架与地板之间的主动式底架支撑件。该主动式底架支撑件配置成在底板上支撑底架。该主动式底架支撑件包括致动器,该致动器配置成在底架与地面之间沿水平方向施加力。该光刻设备还包括控制装置,该控制装置配置成驱动致动器,表示该底架上的扰动力的信号被提供至控制装置,该控制装置配置成使用力传感器信号来驱动致动器。 |
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AbstractList | A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged between the base frame and a ground floor. The active base frame support is configured to support the base frame on the ground floor. The active base frame support comprises an actuator configured to exert a force in a horizontal directionbetween the base frame and the ground plane. The lithographic apparatus further comprises a control device configured to drive the actuator, a signal representative of a disturbance force on the baseframe being provided to the control device, the control device being configured to drive the actuator using the force sensor signal.
种光刻设备包括:构造成形成光刻设备的支撑结构的底架、布置在底架与地板之间的主动式底架支撑件。该主动式底架支撑件配置成在底板上支撑底架。该主动式底架支撑件包括致动器,该致动器配置成在底架与地面之间沿水平方向施加力。该光刻设备还包括控制装置,该控制装置配置成驱动致动器,表示该底架上的扰动力的信号被提供至控制装置,该控制装置配置成使用力传感器信号来驱动致动器。 |
Author | BUTLER HANS DE HOON CORNELIUS ADRIANUS LAMBERTUS WIJCKMANS MAURICE WILLEM JOZEF ETIENNE BUKKEMS BJORN HUBERTUS MARIA |
Author_xml | – fullname: BUKKEMS BJORN HUBERTUS MARIA – fullname: WIJCKMANS MAURICE WILLEM JOZEF ETIENNE – fullname: BUTLER HANS – fullname: DE HOON CORNELIUS ADRIANUS LAMBERTUS |
BookMark | eNrjYmDJy89L5WSw8sksychPL0osyMhMVkgsKEgsSiwpLVbISCzLzEtXSMxTSEwuySxLVUhKLE5VSCtKzE1VKC4tKMgvKuFhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfHOfoYGFsZmlsYWFo7GxKgBAJw_MRU |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
DocumentTitleAlternate | 具有主动式底架支撑件的光刻设备 |
ExternalDocumentID | CN108369388A |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_CN108369388A3 |
IEDL.DBID | EVB |
IngestDate | Fri Aug 16 05:55:30 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | Chinese English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_CN108369388A3 |
Notes | Application Number: CN201680074430 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180803&DB=EPODOC&CC=CN&NR=108369388A |
ParticipantIDs | epo_espacenet_CN108369388A |
PublicationCentury | 2000 |
PublicationDate | 20180803 |
PublicationDateYYYYMMDD | 2018-08-03 |
PublicationDate_xml | – month: 08 year: 2018 text: 20180803 day: 03 |
PublicationDecade | 2010 |
PublicationYear | 2018 |
RelatedCompanies | ASML NETHERLANDS BV |
RelatedCompanies_xml | – name: ASML NETHERLANDS BV |
Score | 3.2800899 |
Snippet | A lithographic apparatus comprises a base frame constructed to form a supporting structure of the lithographic apparatus, an active base frame support arranged... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
Title | Lithographic apparatus having an active base frame support |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180803&DB=EPODOC&locale=&CC=CN&NR=108369388A |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_m_HzTqej8IIL0rTjXjzVCEZe2DHHdkCl7G0lsXH3oim0R_OtNYud80dcLHJeD-8zdLwCXHubCYRybQiSuLFAoM2Ucd02nZydd1nUtphtuw9gdPNn3U2fagLflLozGCf3Q4IjSori091L763zVxAr0bGVxxVJJWtxGEz8w6ur4WqEkWkbQ98PxKBgRgxCfxEb8KHNdz3Kx5Xl3a7Cu0miFsx8-99VWSv47pES7sDGW3LJyDxqf8xZsk-XPay3YGtYP3i3Y1BOavJDE2gqLfbh5SMv5N9R0yhHNNXx3VSC1cJ-9Ipohqr0YUiEKCTV-hYoqV5n2AVxE4YQMTCnO7OfuMxKvJLcOoZktsuQIEE5euMKK5w7v2DLlxw7m0rcJ2hMuox3vGNp_82n_d3gCO0qPesbNOoVm-V4lZzLuluxcK-wL8xuHKw |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5qfdSbRkXrawXJLdg2byGI3TREbdMiVXoL2TWx8ZAGkyD4691dU-tFr7MwzA7Mc2e-Bbi0bJrohNpKksQGK1AiorA4bii6qcU90jNUIhpuo8Dwn7T7mT5rwNtyF0bghH4IcERmUZTZeyn8db5qYrlitrK4IikjLW68qePKdXXc5SiJquz2ncFk7I6xjLGDAzl4ZLmupRq2alm3a7BucnRenjo99_lWSv47pHg7sDFh3LJyFxqfcwlaePnzmgRbo_rBW4JNMaFJC0asrbDYg-thWs6_oaZTiqJcwHdXBeIL99krijIUCS-GeIhCCR-_QkWV80x7Hy68wRT7ChMn_Ll7iIOV5OoBNLNFFh8CsuMXyrHiqU47Gkv5bd2mzLclkZkYJOpYR9D-m0_7v8NzaPnT0TAc3gUPx7DNdSrm3dQTaJbvVXzKYnBJzoTyvgBt6IoY |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Lithographic+apparatus+having+an+active+base+frame+support&rft.inventor=BUKKEMS+BJORN+HUBERTUS+MARIA&rft.inventor=WIJCKMANS+MAURICE+WILLEM+JOZEF+ETIENNE&rft.inventor=BUTLER+HANS&rft.inventor=DE+HOON+CORNELIUS+ADRIANUS+LAMBERTUS&rft.date=2018-08-03&rft.externalDBID=A&rft.externalDocID=CN108369388A |