DIELECTRIC CLADDING OF MICROELECTROMECHANICAL SYSTEMS (MEMS) ELEMENTS FOR IMPROVED RELIABILITY

• Main Authors: SING, MOLLY NELIS, JACOBS, SIMON JOSHUA, TAYLOR, KELLY JAY
• Format: Patent
• Language: Chinese; English
• Published: 10.07.2018
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention relates to a dielectric cladding of microelectromechanical systems (MEMS) elements for improved reliability. In described examples, a method of forming a microelectromechanical device comprises: forming (102) a first metallic layer comprising a conducting layer on a substrate; forming...