Manufacturing method and manufacturing platform of fine metal mask

• Main Authors: WANG RENPENG, ZHOU YANGCHUAN, LI JIANHUA, SU JUNHAI, WU JUNXIONG, QIN FUMING, KE XIANJUN
• Format: Patent
• Language: Chinese; English
• Published: 06.07.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to the field of evaporation, and discloses a manufacturing platform of a fine metal mask. The manufacturing platform comprises a supporting platform and an air flotation platformmounted on the supporting platform. A mask frame is suspended on the surface of the air flotation platform by adjusting the air flotation magnitude of the air flotation platform. Through the adoptionof the technical scheme, friction between the mask frame and the supporting platform is reduced, and therefore the precision of the manufactured mask is higher, the design requirement can be met better, and the corresponding and matching degree of the precise evaporation metal mask and substrate glass is further improved. 本发明涉及蒸镀领域，公开了种精细金属掩膜板制作平台，包括支撑平台及安装在所述支撑平台上的气浮平台，通过调节所述气浮平台的气浮大小，使掩膜板框架悬浮于所述气浮平台表面。采用该技术方案减少了掩膜板框架与支撑平台之间的摩擦，从而使得制作的掩膜板精度更高，更能符合设计要求，从而进步改善了精密蒸镀金属掩膜板与衬底基板玻璃的对应吻合程度。