MEMS microstructure three-axis excitation device with movable base structure

• Main Authors: LONG MINGTAO, SHE DONGSHENG, LIU CHUANG, HONG YIPING, WEI ZEFEI, YANG ZHENSHAN
• Format: Patent
• Language: Chinese; English
• Published: 29.06.2018
• Subjects: MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention discloses an MEMS microstructure three-axis excitation device with a movable base structure. The MEMS microstructure three-axis excitation device comprises a sleeve, a bottom plate, piezoelectric ceramic, a pressure sensor, upper and lower connecting blocks, a steel ball, an elastic supporting member and an MEMS microstructure; an annular top plate is arranged at the upper end of thesleeve, and the microstructure is arranged on the annular top plate through the elastic supporting member; guiding shafts are uniformly arranged between the top plate and the bottom plate, and guidesupporting arms penetrating through the sleeve wall and sleeving the guiding shafts are uniformly distributed on the lower connecting block; spherical grooves are respectively formed in the upper andlower connecting blocks, and tension springs are uniformly arranged on a circumference between the upper and lower connecting blocks; the piezoelectric ceramic is sandwiched between the pressure sensor and the elastic supportin