Preparation method of large-size aluminum nitride ceramic substrate

• Main Authors: SHI YING, XIE JIANJUN, ZHANG LEI, JIA YINGFEI, DING MAOMAO, WANG TUN, LEI FANG
• Format: Patent
• Language: Chinese; English
• Published: 04.05.2018
• Subjects: ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; LIME, MAGNESIA; METALLURGY; PERFORMING OPERATIONS; REFRACTORIES; SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURESCONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER; SLAG; TRANSPORTING; TREATMENT OF NATURAL STONE; WORKING CEMENT, CLAY, OR STONE

The invention provides a preparation method of a large-size aluminum nitride ceramic substrate. The prepared aluminum nitride ceramic substrate has the advantages of high density, high heat conductivity, surface evenness, small tilting degree and the like. The process is in a one-step molding manner, the production efficiency is improved, and the production cost is reduced. With the adoption of different sintering aid systems, the sintering temperature of aluminum nitride is effectively lowered; and with the adoption of optimized rubber dumping and sintering system, the rubber dumping time andsintering and temperature maintaining time can be greatly decreased. The high-density aluminum nitride ceramics are prepared. With the adoption of a special lamination manner, the residual stress inbiscuits is effectively reduced, and by combining with weight leveling treatment and using a polished boron nitride sagger, the prepared substrate is smooth in surface and small in tilting degree. According to the method discl