Mask

• Main Authors: GONG JIANGUO, RAN YINGGANG, LI JIANHUA, SU JUNHAI, WU JUNXIONG, KE XIANJUN
• Format: Patent
• Language: Chinese; English
• Published: 20.03.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a mask. The mask comprises a dummy zone and at least one effective evaporation zone; the dummy zone is arranged outside the at least one effective evaporation zone; a plurality of first through holes are formed in the at least one effective evaporation zone; a plurality of second through holes are formed in the dummy zone; the second through holes and the first through holes are identical in shape and equal in size; and the distance among the second through holes is equal to that among the first through holes. The second through holes are formed in the dummy zone outside the at least one effective evaporation zone, and the second through holes and the first through holes are identical in shape, size and distance, so that the dummy zone has the same mechanical properties as the at least one effective evaporation zone and has the same stress characteristic as the at least one effective evaporation zone, wrinkles are not produced easily between the dummy zone andthe at least one effectiv