Sheet material carrying tool

The invention discloses a sheet material carrying tool comprising a carrying rack and a cover matched with the carrying rack. The carrying rack comprises at least one carrying bar and at least one support bar pair, the carrying bar bears a sheet material from the bottom, the at least one support bar...

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Bibliographic Details
Main Authors DENG HAO, WEI CHAOFENG, CAO MINGQI, ZHANG JILEI
Format Patent
LanguageChinese
English
Published 06.03.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention discloses a sheet material carrying tool comprising a carrying rack and a cover matched with the carrying rack. The carrying rack comprises at least one carrying bar and at least one support bar pair, the carrying bar bears a sheet material from the bottom, the at least one support bar pair supports the sheet material from two sides of the sheet material, and the cover and the carrying bar are arranged oppositely. The sheet material carrying tool solves the problem that an existing silicon wafer carrier cannot carry silicon wafers stably, and the silicon wafers bump against eachother easily, and the cleaning or processing effect can be affected easily due to adhesion. The sheet material carrying tool comprises the carrying rack and the cover which are matched with each other, sheet materials are restricted between the carrying rack and the cover from each direction, and unnecessary bumps of the sheet materials are reduced and even avoided; furthermore, the carrying rackis provided with a blockin
Bibliography:Application Number: CN201610695811