APPARATUS FOR COATING SUBSTRATES
An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in thevacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
13.02.2018
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in thevacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to heat the substrates; rotating means configured to rotate substrates relative to the one or more targets, the cooling unit and/or the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive the cooling unit and the heating unit. Thevacuum chamber defines a lifting axis along which the cooling unit and/or the heating unit and the lifting chamber are arranged, and the apparatus further comprises displacement means configured to displace the cooling unit and/or the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber.
种用于涂覆衬底的设备,包括真空腔室,具有开口和门,通过开口能够容纳衬底,以及门配置成密封开口;个或多个靶,布置在真空腔室中;配置成冷却衬底的冷却单元和/或配置成加热衬底的加热单元;旋转装置,配置成相 |
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Bibliography: | Application Number: CN201710647150 |