Anti-coking diamond-like carbon film preparation method

• Main Authors: WANG PEIPEI, LI ZHENDUO, LI LIN
• Format: Patent
• Language: Chinese; English
• Published: 30.01.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides an anti-coking diamond-like carbon film preparation method. According to the method, a substrate is sequentially subjected to activation treatment, nitrogen injection, carbon injection and deposition so as to mold a diamond-like carbon film layer on the substrate, wherein the bonding strength between the film and the substrate can be improved and the toughness of the diamond-like carbon film can be enhanced by injecting the nitrogen; and during the carbon injection, the negative pulse bias voltage is strictly controlled at 20-30 KV, the pulse frequency is 650-950 Hz, theduty ratio does not exceed 1%, and the vacuum degree is 0.5-2 Pa, such that the hardness of the finally prepared diamond-like carbon film can be 20-30% of the hardness of diamond, the surface friction coefficient is less than or equal to 0.05, the wear rate is less than or equal to 1*10<-9>, the film-substrate bonding strength is up to 40N, and the hydrophobic angle and the oleophobic angle can be respectively up to 140