Ultraviolet detector and production method thereof

• Main Authors: SHEN DEZHEN, LIU KEWEI, LI BINGHUI, CHEN XING, ZHANG ZHENZHONG
• Format: Patent
• Language: Chinese; English
• Published: 12.01.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The invention discloses an ultraviolet detector and a production method thereof. The production method includes: providing a substrate; forming a ZnMgO layer on the surface of the substrate, wherein the surface of the ZnMgO layer includes an electrode area and a non-electrode area; forming electrodes on the electrode area, wherein the surface of each electrode is provided with In particles; subjecting the non-electrode area to fluorine modification processing to enable the non-electrode area to have fluorine contained functional groups, wherein the function groups are used for increasing adsorption quantity and adsorption rate on oxygen. By the arrangement, the characteristics of responsibility, dark current and response time of the ultraviolet detector can be optimized simultaneously. 本发明公开了种紫外探测器及其制作方法，该制作方法包括：提供衬底；在所述衬底表面形成ZnMgO层；所述ZnMgO层的表面包括电极区域以及非电极区域；在所述电极区域形成电极，所述电极表面具有In粒；对所述非电极区域进行氟修饰处理，使得所述非电极区域具有含氟的官能团；其中，所述官能团用于增加对氧气的吸附量以及吸附速率。本发明技术方案可以同时优化紫外探测器的响应度、暗电流以及响应时间这三个特性。