Flexible magnetic field measurement device and manufacturing method

The invention discloses a flexible magnetic field measurement device and a manufacturing method and belongs to the magnetic sensor field. The device comprises a flexible substrate layer, a metal buffer layer, a magnetostrictive layer, a piezoelectric film layer and a protection layer which are seque...

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Bibliographic Details
Main Authors QIU JING, CHANG QIJIE, HU ZHENWEN, LONG YIBING, HE XINGDUO
Format Patent
LanguageChinese
English
Published 12.01.2018
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The invention discloses a flexible magnetic field measurement device and a manufacturing method and belongs to the magnetic sensor field. The device comprises a flexible substrate layer, a metal buffer layer, a magnetostrictive layer, a piezoelectric film layer and a protection layer which are sequentially laminated from down to up, wherein a side of the piezoelectric film layer corresponding to the protection layer is provided with an energy transducer layer embedded in the protection layer, and the energy transducer layer is a single-end or double-end resonance type structure composed of aninterdigital energy transducer and a reflecting grating. The measurement device is advantaged in that through utilizing the flexible substrate material, compared with a sensor prepared from a traditional rigidity substrate material, besides surface acoustic wave modes including common rayleigh waves and Love waves, a new wave mode, e.g., lamb waves can be further generated by the flexible magneticsensor, so bending proper
Bibliography:Application Number: CN20171724664